Electronic component for an integrated circuit

Details Electronic component for an integrated circuit Electronic component for an integrated circuit

1997-05-27

1998-10-20

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257301, 257304, 257535, H01L 2900

Patent

active

058250735

ABSTRACT:
A method for making a metal-to-metal capacitor for an integrated circuit includes forming a layer of titanium/titanium nitride on a polysilicon which has been patterned with interlevel dielectrics. A capacitor dielectric is then deposited, followed by patterning with photoresist to delineate the capacitor, etching to remove extraneous dielectric, deposition of aluminum, further patterning and etching to define the capacitor and access area, and removal of photoresist.

REFERENCES:
patent: 5005102 (1991-04-01), Larson
patent: 5057447 (1991-10-01), Patterson et al.
patent: 5065220 (1991-11-01), Patterson et al.
patent: 5108941 (1992-04-01), Patterson et al.
patent: 5195017 (1993-03-01), McDonald
patent: 5244825 (1993-09-01), Coleman et al.
patent: 5290729 (1994-03-01), Hayashide et al.
patent: 5300450 (1994-04-01), Shen et al.
patent: 5304506 (1994-04-01), Porter et al.
patent: 5312769 (1994-05-01), Matsuo et al.
patent: 5326724 (1994-07-01), Wei
patent: 5338701 (1994-08-01), Hsu et al.
patent: 5340765 (1994-08-01), Dennison et al.
patent: 5393691 (1995-02-01), Hsu et al.
patent: 5418388 (1995-05-01), Okudaira et al.
patent: 5436477 (1995-07-01), Hashizume et al.
patent: 5478772 (1995-12-01), Fazan
patent: 5576240 (1996-11-01), Kadosevich et al.
patent: 5654581 (1997-08-01), Kadosevich et al.

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