Electronic component and method for manufacturing the same

Details Electronic component and method for manufacturing the same Electronic component and method for manufacturing the same

2007-02-20

2007-02-20

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S320000

Reexamination Certificate

active

10913311

ABSTRACT:
An insulating film including an aluminum nitride film is provided on a support substrate to be supported thereby. Then, a lower electrode, a piezoelectric thin film, and an upper electrode are provided in that order on the aluminum nitride film. The piezoelectric film is disposed between the lower electrode and the upper electrode which oppose each other. Furthermore, the aluminum nitride film is subjected to a plasma treatment in an oxygen-containing atmosphere to form an oxide layer on the aluminum nitride film, the oxide layer being made smoother than the aluminum nitride film.

REFERENCES:
patent: 6548937 (2003-04-01), Klee et al.
patent: 6842088 (2005-01-01), Yamada et al.
patent: 6905970 (2005-06-01), Shing et al.
patent: 6954121 (2005-10-01), Bradley et al.
patent: 2001-168674 (2001-06-01), None

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