Electronic component and filter including the same

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C310S320000, C310S367000, C310S368000, C333S187000, C333S192000

Reexamination Certificate

active

07116040

ABSTRACT:
An electronic component of an embodiment of the present invention comprises a first piezoelectric thin film resonator and a second piezoelectric thin film resonator. The first piezoelectric thin film resonator and second piezoelectric thin film resonator are a piezoelectric thin film resonator that has a structure in which a piezoelectric thin film is interposed between a lower electrode and an upper electrode, that is constituted in an area where the lower electrode, piezoelectric thin film, and upper electrode overlap each other, and that obtains a signal with a predetermined resonance frequency by bulk waves propagating inside the piezoelectric thin film. The interval between a part of a periphery of the first piezoelectric thin film resonator and a part of a periphery of the second piezoelectric thin film resonator that face each other is not constant.

REFERENCES:
patent: 4114062 (1978-09-01), Mattuschka
patent: 4584499 (1986-04-01), Leskovec et al.
patent: 6842089 (2005-01-01), Lee
patent: 6946772 (2005-09-01), Inoue et al.
patent: 2005/0093656 (2005-05-01), Larson et al.
patent: 55-140314 (1980-11-01), None
Thin Film Resonator Technology by K.M. Lakin IEEE 2003 FCS-EFTF Paper We1A-4 May 5-8, 2003.
K.M. Lakin et al.; “Solidly Mounted Resonators and Filters”; IEEE Ultrasonics Symposium; pp. 905-908; dated 1995.

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