Stock material or miscellaneous articles – Composite – Of silicon containing
Patent
1997-04-11
2000-02-29
Thibodeau, Paul
Stock material or miscellaneous articles
Composite
Of silicon containing
428620, 428641, 338 25, 338 42, 73700, 73706, 73753, 73754, 438 53, 438 54, B32B 904, B32B 1500, H01L 2912, H01C 304
Patent
active
060307099
ABSTRACT:
The invention relates to an electronic component manufactured in thick film technology, thin film technology or silicon technology and then provided with an electrically insulating layer which is covered by an amorphous metal layer. The amorphous metal layer protects the component, even with the smallest of layer thicknesses, from external influences and directly transmits heating and force effects.
REFERENCES:
patent: 4686764 (1987-08-01), Adams et al.
patent: 4732042 (1988-03-01), Adams
patent: 4999317 (1991-03-01), Lu et al.
"Phase Separation in Interactions of Tantalum-Chromium Alloy on SI", C. J. Palmstrom, J. Gyulai and J. W. Mayer, J. Vac. Sci. Technol. A 1(2), Apr.-Jun. 1983, 0734-2101/83/020452-03, 1983 American Vacuum Society, pp. 452-454.
Andersen Per Ellemose
Brown Tina Romedahl
Dyrbye Karsten
Jensen Niels Due
Grundfos a/s
Rickman Holly C.
Thibodeau Paul
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