Electronic circuit device having thin film resistor and method f

Details Electronic circuit device having thin film resistor and method f Electronic circuit device having thin film resistor and method f

1991-04-24

1993-06-08

Lateef, Marvin M.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

338225, 338223, 20419221, H01C 1012

Patent

active

052183351

ABSTRACT:
In an electronic circuit device, a thin film resistor is formed on a substrate and includes first regions including one kind of atom such as Cr and exhibiting an electric conductivity and a second region including a compound such as SiO.sub.2 composed of two kinds of atoms and exhibiting an insulating property. In the thin film resistor, the first regions are scattered in the second region and have an average particle size of 2 nm to 20 nm.

REFERENCES:
patent: 4010312 (1977-03-01), Pinch et al.
patent: 4343986 (1992-08-01), Mitani et al.
patent: 4460494 (1984-07-01), Abe et al.
patent: 4749981 (1988-07-01), Yui et al.
patent: 5068756 (1991-11-01), Morris et al.
S. M. Ojha, Thin Solid Films 57(1979) 363-366.
J. F. Henrickson, et al., Journal of Applied Physics, vol. 40, No. 13, Dec. 1969 pp. 5006-5014.
W. M. Paulson, et al., J. Vac. Sci. Technol., vol. 14, No. 1, Jan./Feb. 1977, pp. 210-218.
Phys. B11 (1975) pp. 2795-2811, Lee, et al. "Theory of the Extended X-ray Absorption Fine Structure".
Physical Society of Japan, vol. 34, No. 7, (1979), pp. 589-598.
DE-Z: "radiomentor" 11 (1968) S. 786 bis 789.
DE-Z: "industrie elektrik & elektronik" 16. Jahrgang (1971) No. 17 S. 435 bis 438.

Affiliated with

Also associated with

Rating

Electronic circuit device having thin film resistor and method f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electronic circuit device having thin film resistor and method f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electronic circuit device having thin film resistor and method f will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1945092