Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1988-05-05
1990-04-10
Wityshyn, Michael
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
29740, 156495, 156497, 156584, 221 71, 221 87, B65B 6900, B65H 528
Patent
active
049157701
ABSTRACT:
In an electronic chip supplying apparatus, a vacuum suction device for sucking a retainer tape which encases electronic chips is provided in a retainer tape support member provided at an opening position where the electronic chips are picked up from a chip pickup device, or a tension applying device for the retainer is provided. Thus, vertical fluctuation of the retainer tape is prevented at the opening position.
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Fujishiro Keisuke
Haeda Yoshio
Itagaki Masato
Hitachi , Ltd.
Wityshyn Michael
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