Electronic-beam programmable semiconductor device structure

Details Electronic-beam programmable semiconductor device structure Electronic-beam programmable semiconductor device structure

1977-09-19

1980-02-26

Larkins, William D.

Static information storage and retrieval

Magnetic bubbles

Guide structure

357 29, 357 45, 357 54, 357 59, 365185, H01L 2978, H01L 2934, H01L 2710, G11C 1140

Patent

active

041908490

ABSTRACT:
A semiconductor device structure is provided in which an electrically isolated or "floating" conductor is adapted to receive electric charge from an electron beam. The resultant stored charge provides the basis for useful electronic functions such as floating gate MOS read-only-memories.

REFERENCES:
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patent: 3573753 (1971-04-01), Skelly et al.
patent: 3660819 (1972-05-01), Frohman-Bentchkowsky
patent: 3721962 (1973-03-01), Foster et al.
patent: 3736571 (1973-05-01), Cohen et al.
patent: 3825946 (1974-07-01), Frohman-Bentchkowsky
patent: 3886530 (1975-05-01), Huber et al.
patent: 4079358 (1978-03-01), Arntz
patent: 4087795 (1978-05-01), Rossler
Davis et al., "Automatic Registration In An Electron-Beam Exposure System", IEEE Int. Electron Devices Meeting (12/76), Tech. Dig. pp. 440-442.
Thornton, Scanning Electron Microscopy, Chapman & Hall, London, (1968), pp. 111-114.

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