Electron spectroscopy system for chemical analysis of electrical

Details Electron spectroscopy system for chemical analysis of electrical Electron spectroscopy system for chemical analysis of electrical

1986-04-08

1987-07-14

Church, Craig E.

Radiant energy

Electron energy analysis

250309, 250310, H01J 4908

Patent

active

046804676

ABSTRACT:
An electron spectroscopy system is disclosed which is specially suited for chemical analysis of electrically isolated specimens. X-rays or other ionizing radiation is focused to a relatively small spot on the surface of the electrically isolated sample to be analyzed. An electron energy analyzer has its input optics focused such that the input field of view of the electron energy analyzer is coincident with the beam spot produced by the focused beam of ionizing radiation on the specimen so as to capture secondary photoelectrons emitted from the surface of the sample under analysis. The energies of the secondary photoelectrons are analyzed to obtain a spectrum of the constituents of the surface of the sample under analysis. A flood beam of relatively low energy electrons is directed onto the surface of the sample for neutralizing the positive surface charge in the region of the beam spot. An electrically conductive grid is positioned in closely spaced relationship to the surface of the sample for smoothing the gradients in the electrical potential in the region of the beam spot, thereby improving the resolution of the secondary photoelectron energy spectrum obtained from the sample under analysis.

REFERENCES:
patent: 3665185 (1972-05-01), Goff
patent: 4587425 (1986-05-01), Plows

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