Electron spectroscopy apparatus

Details Electron spectroscopy apparatus Electron spectroscopy apparatus

1995-01-30

1996-10-29

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

250305, 250310, 378 43, H01J 3700

Patent

active

055699162

ABSTRACT:
An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen, and the time it takes these photoelectrons to pass along a flight channel is measured and analyzed.

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