Electron spectroscopy analyzer and a method of correcting a shif

Details Electron spectroscopy analyzer and a method of correcting a shif Electron spectroscopy analyzer and a method of correcting a shif

1993-09-20

1994-10-04

Berman, Jack I.

Radiant energy

Electron energy analysis

250310, H01J 3726

Patent

active

053528948

ABSTRACT:
In an electron spectroscopy analyzer for obtaining an electron spectroscopy spectrum by applying to a sample an X-ray or electron beam from a first beam source and by analyzing the energy of secondary electrons emitted from the sample, an amount of energy shift of a reflected beam from the sample is obtained by applying a charging beam from second beam source, and a shift of the electron spectroscopy spectrum is corrected in accordance with the amount of energy shift. With this structure, a shift of a spectral line due to charges on the sample surface caused by the application of the X-ray or electron beam is corrected, thereby improving accuracy of the measurement of values and intensity of energy.

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"Effects of Helium Ion Bombardment on Auger Electron Spectroscopy (II)", Journal of Applied Physics Soc., 1990, 28a-ZG-3.

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