Electron source producing apparatus and method

Details Electron source producing apparatus and method Electron source producing apparatus and method

2004-12-02

2008-11-04

Roy, Sikha (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Apparatus

Having means to operate the device or portion thereof, e.g.,...

C445S024000, C445S016000, C313S311000, C313S495000, C438S017000, C438S020000, C427S077000

Reexamination Certificate

active

07445535

ABSTRACT:
An electron source producing apparatus for forming an electron-emission part on a conductive member disposed on a substrate in an atmosphere containing a desired gas. The apparatus includes a container for forming a hermetic atmosphere between the container and a surface of the substrate on which the conductive member is formed. The container has a gas inlet and a gas outlet. A diffusing member is for diffusing an introduced gas, and is disposed between the gas inlet and the surface of the substrate. A resisting member provides exhaust resistance, and is disposed between the gas outlet and the surface of the substrate and is separated from the gas outlet. The resisting member is disposed closer to the surface of the substrate than is the diffusing member.

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