Electron source manufacturing apparatus and electron source...

Details Electron source manufacturing apparatus and electron source... Electron source manufacturing apparatus and electron source...

2007-06-05

2007-06-05

Roy, Sikha (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With testing or adjusting

C445S006000, C445S063000

Reexamination Certificate

active

10957839

ABSTRACT:
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.

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