Electron source, image display device manufacturing...

Details Electron source, image display device manufacturing... Electron source, image display device manufacturing...

2005-01-25

2005-01-25

Williams, Joseph (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With start up, flashing or aging

C445S024000

Reexamination Certificate

active

06846213

ABSTRACT:
An electron source/image display device manufacturing apparatus according to this invention includes (A) a support which supports a substrate having a first major surface and a second major surface on which a conductor is arranged, and includes a plurality of electrostatic chucks each having a conductive member, (B) a vessel which has a gas inlet port and an exhaust port, and covers part of the first major surface, (C) a valve connected to the inlet port to introduce gas into the vessel, (D) an exhaust system connected to the exhaust port to exhaust the gas from the vessel, and (E) a power supply for applying a predetermined potential difference between the conductor and the conductive member. This apparatus arrangement enables easy, stable processing in the “forming” and “activation” steps.

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