Electron probe testing, analysis and fault diagnosis in electron

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324 51, 324 73PC, G01R 3122, G01R 1512, G01R 3102

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active

041692446

ABSTRACT:
A method of testing electronic networks in which an electron probe is moved from point to point in the network and a current of secondary electrons emitted in response to the impingement of the probe is converted to a signal denoting voltage or field strength at the various points. A scanning apparatus in which an electronic collector including grids in the path of the beam and an annular scintillator is described.

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patent: 3796947 (1974-03-01), Harrod et al.
patent: 3934199 (1976-01-01), Channin
Engel et al., "Electron Beam Testing . . .", J. Phys. D., Appl. Phys., 1970, vol. 3, pp. 1505-1508.

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