Electron probe microanalyzer comprising an observation system ha

Details Electron probe microanalyzer comprising an observation system ha Electron probe microanalyzer comprising an observation system ha

1982-01-18

1984-04-03

Henry, Jon W.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

350511, 350525, 350526, 350257, 250310, G02B 2118

Patent

active

044404751

ABSTRACT:
The electromagnetic lens for focusing the analyzing electron beam is provided with a central channel along the axis of the electron beam which is intended to pass through a mirror-objective having high magnification. The electromagnetic lens further comprises a lateral channel in which is placed an auxiliary objective having low magnification. An optical illumination system, the axis of which is contained in the plane of the axes of the objectives, illuminates the sample either through the principal objective or through the auxiliary objective. An orientable mirror which is orthogonal to the plane aforesaid and placed at the intersection of the beams which form the images through the two objectives permits the use of the same observation means both for low magnification and for high magnification.

REFERENCES:
G. A. Leavitt, "An Instrument", Advances in Instrumentation, vol. 29, Part 2, pp. 1-7.

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