Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1976-12-29
1978-06-20
Weisstuch, Aaron
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
118 491, 118500, 118503, 204192N, C23C 1500
Patent
active
040960552
ABSTRACT:
An electron microscopy coating apparatus and coating methods incorporate a specimen mounting arrangement which is used both for coating specimens which are to be viewed by scanning electron microscopy (SEM) and for coating specimens which are to be viewed by transmitted electron microscopy (TEM) and for coating specimens for the recently developed scanning-transmitted electron microscopy (STEM).
The coating apparatus and method includes a hood and a mixer disc for coating by cold cathode sputtering and can also be used (with arc type electrodes in place of the hood and mixer disc) for coating by either charged ion evaporation or straight film evaporation.
A biasing direct current provides a differential charge for cold cathode sputtering and charged ion evaporation.
For charged ion evaporation the negative lead of the direct current is connected to one electrode of the evaporator and the positive lead of the direct current is connected to the base to provide a differential charge (a negative charge on the evaporated ion and a positive charge on the specimen) to attract the evaporated ions to the specimen.
REFERENCES:
patent: 3329601 (1967-07-01), Mattox
patent: 3351543 (1967-11-01), Vanderslice
patent: 3563873 (1971-02-01), Beyer
patent: 3633537 (1972-01-01), Howe
patent: 3656453 (1972-04-01), Tousimis
patent: 3669871 (1972-06-01), Elmgren et al.
patent: 3783822 (1974-01-01), Wollam
patent: 3858547 (1975-01-01), Bergfelt
patent: 4013830 (1977-03-01), Pinch et al.
Feix Donald C.
Weisstuch Aaron
LandOfFree
Electron microscopy coating apparatus and methods does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron microscopy coating apparatus and methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron microscopy coating apparatus and methods will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1133125