Electron microscope image output method and apparatus

Details Electron microscope image output method and apparatus Electron microscope image output method and apparatus

1987-12-24

1989-10-10

Hannaher, Constantine

Radiant energy

Automatic/serial detection of similar sources

250397, 382 6, G03B 4200

Patent

active

048734403

ABSTRACT:
In a system for outputting an electron microscope image, a two-dimensional sensor for storing electron beam energy thereon is exposed to an electron beam passing through a specimen in a vacuum to have the electron beam energy stored on the two-dimensional sensor, and is then exposed to light or heat to release the stored energy as light emission. The emitted light is photoelectrically detected to obtain image signals, and an electron beam image of the specimen is output on the basis of the image signals. The specimen is divided into a plurality of divisions, and the storage of the electron beam energy is carried out for each of the divisions. The image signals obtained at the divisions are combined to form composite image signals that represent an overall specimen image formed by a group of the divisions, and the image signals at the divisions are corrected so that signal values of the boundary areas of adjacent divisions become approximately equal to each other.

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patent: 4651220 (1987-03-01), Hosoi et al.

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