Electron microscope comprising an energy analyzer

Details Electron microscope comprising an energy analyzer Electron microscope comprising an energy analyzer

1975-03-28

1976-09-07

Church, Craig E.

Radiant energy

Electron energy analysis

250311, H01J 3726

Patent

active

039795900

ABSTRACT:
A Wien filter, used as an energy analyzer in an electron microscope, includes a four-pole lens which enlarges the dispersion of electrons in one direction. By addition of six-pole lenses and an additional four-pole lens, correction can be made for opening errors in the electron beam to be analyzed.

REFERENCES:
patent: 3256433 (1966-06-01), Watanabe
"Microanalysis by Electron Energy Analysis with a Cylindrical Magnetic Lens", Ichenokawa, Vth International Congress on X-Ray Optics and Microanalysis, Sept. 1968, pp. 299-304.

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