Electron microscope and spectroscopy system

Optics: measuring and testing – By dispersed light spectroscopy – With raman type light scattering

Reexamination Certificate

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C356S326000, C250S311000

Reexamination Certificate

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06885445

ABSTRACT:
An electron microscope10is adapted to enable spectroscopic analysis of a sample16. A parabolic mirror18has a central aperture20through which the electron beam can pass. The mirror18focuses laser illumination from a transverse optical path24onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system30. The mirror18is retractable (within the vacuum of the electron microscope) by a sliding arm assembly22.

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