Electron microscope

Details Electron microscope Electron microscope

2005-08-16

2005-08-16

Wells, Nikita (Department: 2881)

Radiant energy

Electron energy analysis

C250S311000, C250S306000, C250S3960ML, C250S397000

Reexamination Certificate

active

06930306

ABSTRACT:
A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.

REFERENCES:
patent: 4743756 (1988-05-01), Krivanek
patent: 5798524 (1998-08-01), Kundmann et al.
patent: 6184524 (2001-02-01), Brink et al.
patent: 6703613 (2004-03-01), Kaji et al.
patent: 6794648 (2004-09-01), Kaji et al.
patent: 2004/0000641 (2004-01-01), Taniguchi et al.
patent: 52-27349 (1977-03-01), None
patent: 11-224639 (1999-08-01), None
patent: 2001-93459 (2001-04-01), None
patent: 2001-307672 (2001-11-01), None
patent: 2002-157973 (2002-05-01), None
patent: 2003-151478 (2003-05-01), None
patent: WO00/41206 (2000-07-01), None

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