Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Patent
1993-01-04
1995-02-14
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
2503362, 25037001, 25037015, G01T 136, H01L 31115, H01L 310296
Patent
active
053897927
ABSTRACT:
An electron beam from a scanning electron microscope, or X-rays from an external X-ray source, impinges on a material sample surface thereby causing the generation of fluorescent X-rays characteristic of the elements present in the sample. An improved energy dispersive X-ray detector system for materials analysis, based on a monolithically fabricated thermal detector array and solid state refrigeration system, is described. The detector array converts the X-ray photons to heat, and the heat is measured as a rise in temperature by thermistors in the individual detector elements in the array. The small detector elements in the array are kept at a low temperature so as to achieve an energy resolution of less than 5 eV, and the multiple elements in the array insure that a sufficient X-ray count rate for normal materials analysis is achieved. The signals from the individual thermal detectors in the array are then processed so that a distribution of X-ray counts as a function of energy is produced, and the characteristic X-ray fluorescent lines of the individual elements in the sample can be identified. Accordingly, the composition of the sample may be determined.
REFERENCES:
B. T. Draine and A. J. Sievers, "A High Responsivity, Low-Noise Germanium Bolometer for the Far Infrared." Optics Communications, vol. 16, No. 3 (Mar. 1976) pp. 425-428.
Margaret Osvay, V. Stenger and G. Foldiak, "Silicon Detectors for Measurement of High Exposure Rate Gamma Rays." Proceedings of the Symposium on Advances in Biomedical Dosimetry, Vienna, Austria (Mar. 10-14, 1975) pp. 623-632.
DiMarzio Don
Lesyna Larry
Grumman Aerospace Corporation
Hannaher Constantine
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