Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent
1983-10-21
1985-05-14
Smith, John D.
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
118712, 118720, 118726, 118730, 219275, 219121EE, C23C 1312
Patent
active
045165254
ABSTRACT:
This invention relates more particularly to an electron-gun metal evaporation system for solder (lead/tin, lead/indium) deposition upon integrated circuit chips. This system utilizes a crucible comprised of a tantalum bent-cone V-shaped liner or cup seated in spaced relationship in a recess of a copper hearth.
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Bourgeois Serge
Carle Jean-Franqois
Lochon Henri
Trotin Jean-Pierre
International Business Machines - Corporation
Plantz Bernard F.
Powers Henry
Smith John D.
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