Electron gun assembly

Details Electron gun assembly Electron gun assembly

1982-08-30

1985-01-08

Anderson, Bruce C.

X-ray or gamma ray systems or devices

Source

Electron tube

378134, 250398, H01J 300

Patent

active

044930976

ABSTRACT:
This invention relates to an electron gun assembly for use, for example, in x-ray lithography, which includes an electron emitter assembly, beam forming elements disposed adjacent the electron emitter assembly, a target plane disposed in spaced relationship with respect to the electron emitter assembly, a deflector disposed adjacent the path of the electrons emitted from the electron emitter assembly, a pseudoanode mounted in spaced relationship with respect to the deflector and to the electron emitter assembly and to the target plane, said electron emitter assembly being interposed between the pseudoanode and the target plane.

REFERENCES:
patent: 2482275 (1949-09-01), Horsley
patent: 2569872 (1951-10-01), Skeham et al.
patent: 4017757 (1977-04-01), DeCon
patent: 4215192 (1980-07-01), Buckley

Affiliated with

Also associated with

Rating

Electron gun assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron gun assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron gun assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-117090