Electron gun arrangement for use in the electron beam evaporatio

Details Electron gun arrangement for use in the electron beam evaporatio Electron gun arrangement for use in the electron beam evaporatio

1990-07-25

1991-07-23

Albritton, C. L.

Electric heating

Metal heating

By arc

373 16, B23K 1500

Patent

active

050345907

ABSTRACT:
An electron gun arrangement is for use in the electron beam evaporation process, including the permanent magnet circuit for deflecting the electron beam from its supply source toward its crucible, wherein it further includes electromagnetic coil winding means for sweeping the electron beam to one point to the particular point on the substance to be evaporated. The electromagnetic coil winding means is disposed to surround the permanent magnet circuit.

REFERENCES:
patent: 3472999 (1969-10-01), Yamamoto et al.
patent: 4131753 (1978-12-01), Tsujimoto et al.
patent: 4632059 (1986-12-01), Flatscher et al.
patent: 4728777 (1988-03-01), Smith
patent: 4983806 (1991-01-01), Harper et al.

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