Electric lamp and discharge devices – Electrode and shield structures – Point source cathodes
Patent
1980-03-27
1982-08-24
Chatmon, Jr., Saxfield
Electric lamp and discharge devices
Electrode and shield structures
Point source cathodes
313346R, H01J 116, H01J 1910
Patent
active
043463258
ABSTRACT:
An electron gun for a shaped beam type electron beam delineating system is provided with a cathode which is prepared from a single crystal of lanthanum hexaboride (LaB.sub.6) the convex end portion of which has a tip radius ranging between 260 and 1,000 microns. The electron gun of the invention has a long effective life for producing a stable electron beam which can irradiate a limiting aperture with a uniform current density and insures the sufficiently high brightness of the electron beam image projected on a target.
REFERENCES:
patent: 4054946 (1977-10-01), Ferris et al.
patent: 4055780 (1977-10-01), Kawai et al.
patent: 4137476 (1979-01-01), Ishii et al.
patent: 4200555 (1980-04-01), Joy et al.
patent: 4258283 (1981-03-01), Brunger
patent: 4260525 (1981-04-01), Olsen et al.
Nakasuji Mamoru
Wada Hirotsugu
Chatmon, Jr. Saxfield
Vlsi Technology Research Association
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