Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent
1990-05-24
1991-09-17
LaRoche, Eugene R.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Electron or ion source
31511121, 31323131, 250423R, 250427, H01J 2702
Patent
active
050497847
ABSTRACT:
An electron generating apparatus for an ion source for example, which is capable of prolonging service life and facilitating the exchange of its filament has been proposed. The electron generating apparatus includes an electron generating chamber having a discharging gas supply hole and electron extracting hole, a pair of conductive filament support members mounted in the chamber through an insulating plate, and a filament detachably fixed on the filament support members. At least one of the filament support members is provided with an overhang to cover at least part of a region between the lower ends of the filament.
REFERENCES:
patent: 3178604 (1965-04-01), Eklund
patent: 3448315 (1969-06-01), Hirsch et al.
patent: 3924134 (1975-12-01), Uman et al.
patent: 4691109 (1987-09-01), Magee et al.
patent: 4841197 (1989-06-01), Takayama et al.
Proc. Int'l Ion Engineering Congress-ISIAT '83 & IPAT '83, Kyoto, 1983, pp. 407-410, O. Tabata et al., "Characteristic of a Freeman Ion Source with an AC Filament".
LaRoche Eugene R.
Tokyo Electron Limited
Yoo Do Hyun
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