Electron energy analyzer with multi-channel detector

Details Electron energy analyzer with multi-channel detector Electron energy analyzer with multi-channel detector

1984-03-23

1986-04-22

Anderson, Bruce C.

Radiant energy

Electron energy analysis

2505051, H01J 4000, H01J 4700

Patent

active

045844747

ABSTRACT:
An electron energy analyzer in which electrons arriving through an entrance aperture in an energy-dispersive system, are simultaneously analyzed at the exit of the system through a multi-channel detector operating with channel plates. The electron energy analyzer is distinguished through a grid at the exit of the analyzer which is to be brought to the potential of the entrance aperture plate, at the smallest possible spacing from the channel plate or plates, whose mesh size dimension is so small in comparison with the dimension of the electron beam, that no additional structure will be obtained in the registered electron spectrum because of the grid, with a blending grid mask whose blending conforms with the beam dimension and the spacing of the electrodes in the analyzer, and which is brought to a potential with respect to the channel plate, which is adequate for the aspiration of the electrons strayed from the facing channel plate.

REFERENCES:
patent: 3806728 (1974-04-01), Lindholm et al.
patent: 4128763 (1978-12-01), Polaschegg
J. L. Wize, Nuclear Instruments and Methods, "Microchannel Plate Detectors", vol. 162, (1979), 567.

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