Electron emissive film and method

Details Electron emissive film and method Electron emissive film and method

1999-05-28

2000-08-08

Patel, Vip

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313309, 313336, 313351, 313495, H01J 105

Patent

active

061006289

ABSTRACT:
A method for forming an electron emissive film (200, 730, 830) includes the steps of: (i) evaporating a graphite source (120, 620) in a cathodic arc deposition apparatus (100, 600) to create a carbon plasma (170, 670), (ii) applying a potential difference between the graphite source (120, 620) and a glass or silicon deposition substrate (130, 630, 710, 810) for accelerating the carbon plasma (170, 670) toward the deposition substrate (130, 630, 710, 810), (iii) providing a working gas within the cathodic arc deposition apparatus (100, 600), and (ii) depositing the carbon plasma (170, 670) onto the deposition substrate (130, 630, 710, 810).

REFERENCES:
patent: 5279723 (1994-01-01), Falabella et al.
patent: 5413684 (1995-05-01), Bergmann
patent: 5458754 (1995-10-01), Sathrum et al.
patent: 5536193 (1996-07-01), Kumar
patent: 5804909 (1998-09-01), Nilsson et al.
patent: 5848925 (1998-12-01), Howard et al.

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