Electron emission thin-film, plasma display panel comprising...

Electric lamp and discharge devices – With gas or vapor – Three or more electrode discharge device

Reexamination Certificate

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C313S311000, C313S633000, C313S630000, C313S631000, C445S012000, C445S022000, C445S024000, C445S049000, C445S051000

Reexamination Certificate

active

10275795

ABSTRACT:
An electron emission thin-film with improved secondary electron emission characteristics compared with conventional ones, a plasma display panel including the electron emission thin-film, and their manufacturing methods. Using a vacuum deposition system, a protective layer that is an MgO thin-film is formed on a dielectric layer formed on a front glass substrate. At the time of deposition, angles that lines linking the central point of a target material for the protective layer respectively with the central point and both ends points of the front glass substrate form with the front glass substrate are exclusively in a range of 30 to 80 °. This enables at least some of MgO columnar crystals constituting the protective layer to have flat planes that are inclined with respect to the surface of the thinfilm.

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