Electron emission thin-film, plasma display panel and...

Electric lamp and discharge devices – With gas or vapor – Three or more electrode discharge device

Reexamination Certificate

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C313S586000, C313S582000, C445S024000, C445S025000

Reexamination Certificate

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07911142

ABSTRACT:
Disclosed are an electron emission thin-film with improved secondary electron emission characteristics compared with conventional ones, a plasma display panel including the electron emission thin-film, and their manufacturing methods. Using a vacuum deposition system, a protective layer that is an MgO thin-film is formed on a dielectric layer formed on a front glass substrate. At the time of deposition, angles that lines linking the central point of a target material for the protective layer respectively with the central point and both ends points of the front glass substrate form with the front glass substrate are exclusively in a range of 30 to 80°. This enables at least some of MgO columnar crystals constituting the protective layer to have flat planes that are inclined with respect to the surface of the thin-film.

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