Electron emission device and display device using the same

Details Electron emission device and display device using the same Electron emission device and display device using the same

1998-02-27

2000-02-08

Jackson, Jr., Jerome

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313336, 257 9, 257 10, 257 11, 257 30, 257 37, 257 38, 257 39, H01J 130, H01L 2904

Patent

active

060231246

ABSTRACT:
An electron emission device exhibits a high electron emission efficiency. The device includes an electron supply layer of metal or semiconductor, an insulator layer formed on the electron supply layer, and a thin-film metal electrode formed on the insulator layer. The insulator layer is made of an amorphous dielectric substance and has a film thickness of 50 nm or greater and has an amorphous phase with an average grain size of 5 to 100 nm as a major component and a polycrystal phase as a minor component. When an electric field is applied between the electron supply layer and the thin-film metal electrode, the electron emission device emits electrons.

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Cuomo, "Thin Film Electron Emission Source," IBM Technical Disclosure Bulletin, Vol. 13 No. 11, Apr. 1971.
Journal of Vacuum Science & Technology B, 11 (1993) 514.

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