Electron detector

Details Electron detector Electron detector

1990-03-27

1991-08-27

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250361R, 25036301, H01J 37244

Patent

active

050435833

ABSTRACT:
The present invention relates to an electron detector for use in a scanning electron microscope. The detector is used to detect high and low energy backscattered electrons as well as secondary electrons. The detector is based on the use of a high transparency conductive film over the surface of the detector, whereby the surface is stable to the application of a high voltage. The detector is be used to detect both high and low energy backscattered secondary electrons and has an active surface with an adjacent fine metal mesh grid which is used to transmit electrons without loss of energy, while at the same time providing a conductive surface over the surface of the detector material.

REFERENCES:
patent: 3896308 (1975-07-01), Venables et al.
patent: 4217495 (1980-08-01), Robinson
patent: 4551625 (1985-11-01), Lischke et al.
patent: 4559450 (1985-12-01), Robinson et al.
patent: 4596929 (1986-06-01), Coates et al.
patent: 4803357 (1989-02-01), Brust

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