Electron detection with energy discrimination

Radiant energy – Electron energy analysis

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250310, 250306, 250396ML, 250397, H01J 3705

Patent

active

048824860

ABSTRACT:
By using an electrostatic magnetic dispersing field adapted for that purpose in a measuring space in an electron microscope it is possible to detect substantially all the electrons liberated by a primary beam from a surface of an object to be examined in which the measuring field can be increased without any error by using a variable axis lens system at the area. Auger electrons can be detected selectively by an adapted field strength variation of the magnetic field and superposition of an electrostatic braking field. A magnetic lens for generating the magnetic field may also be used with only small adaptations as an objective lens for the electron microscope.

REFERENCES:
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patent: 4464571 (1984-08-01), Plies
patent: 4540885 (1985-09-01), Plies et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 4728790 (1988-03-01), Plies
Garth S. L. J. et al., "Magnetic Field Extraction of Secondary Electrons For Accurate Integrated Circuit Voltage Measurement", Journal Vac. Science Tech., B4, No. 1, Jan.-Feb., 1986, pp. 217-220.
Pfeiffer, H. C. etal., "Advanced Deflection Concept for Large Area, High Resolution E-Beam Lighothgraphy", Journ. Vac. Sci. Techn., 19(4), Nov.-Dec., 1981.

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