Radiant energy – Electron energy analysis
Patent
1989-04-21
1989-11-21
Fields, Carolyn E.
Radiant energy
Electron energy analysis
250310, 250306, 250396ML, 250397, H01J 3705
Patent
active
048824860
ABSTRACT:
By using an electrostatic magnetic dispersing field adapted for that purpose in a measuring space in an electron microscope it is possible to detect substantially all the electrons liberated by a primary beam from a surface of an object to be examined in which the measuring field can be increased without any error by using a variable axis lens system at the area. Auger electrons can be detected selectively by an adapted field strength variation of the magnetic field and superposition of an electrostatic braking field. A magnetic lens for generating the magnetic field may also be used with only small adaptations as an objective lens for the electron microscope.
REFERENCES:
patent: 3474245 (1966-06-01), Kimura et al.
patent: 4464571 (1984-08-01), Plies
patent: 4540885 (1985-09-01), Plies et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 4728790 (1988-03-01), Plies
Garth S. L. J. et al., "Magnetic Field Extraction of Secondary Electrons For Accurate Integrated Circuit Voltage Measurement", Journal Vac. Science Tech., B4, No. 1, Jan.-Feb., 1986, pp. 217-220.
Pfeiffer, H. C. etal., "Advanced Deflection Concept for Large Area, High Resolution E-Beam Lighothgraphy", Journ. Vac. Sci. Techn., 19(4), Nov.-Dec., 1981.
Fields Carolyn E.
Miller John A.
Miller Paul R.
U.S. Philips Corporation
LandOfFree
Electron detection with energy discrimination does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron detection with energy discrimination, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron detection with energy discrimination will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1427646