Electron cyclotron resonance negative ion source

Details Electron cyclotron resonance negative ion source Electron cyclotron resonance negative ion source

1986-04-08

1988-07-12

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511121, 31511101, 31323131, 250423R, H01J 724

Patent

active

047572370

ABSTRACT:
An electron cyclotron resonance negative ion source comprises an enclosure containing a gas or vapor of a material for forming a plasma, means for injecting into the enclosure a high frequency electromagnetic field forming electrons by ionizing the gas or vapor, means for producing within the enclosure an axially symmetric magnetic field whose amplitude increases along the axis of symmetry, whereby said amplitude, which is at a maximum in the vicinity of and upstream of the negative ion extraction zone, having in the central region of the enclosure a value for which the electron cyclotron resonance condition is satisfied, as well as means for extracting the negative ions formed, brought to a positive potential compared with the enclosure.

REFERENCES:
patent: 4417178 (1983-11-01), Geller et al.
patent: 4447773 (1984-05-01), Aston
patent: 4602161 (1986-07-01), Whealton et al.

Affiliated with

Also associated with

Rating

Electron cyclotron resonance negative ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron cyclotron resonance negative ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron cyclotron resonance negative ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-666000