Electron collector for forming low-loss electron images

Details Electron collector for forming low-loss electron images Electron collector for forming low-loss electron images

1978-09-29

1979-12-18

Dixon, Harold A.

Radiant energy

Electron energy analysis

250310, H01J 3900

Patent

active

041796047

ABSTRACT:
In a scanning electron beam system wherein a primary beam of electrons is anned over the surface of a specimen and electron images are generated by collecting electrons scattered from the surface, an improved electron collector for selectively collecting the primary electrons that have suffered low loss in being scattered by the surface. Three symmetrically shaped mesh grids are arranged in front of a scintillator in the path of the backscattered electrons. The grids are disposed relative to each other and biased so that the electric fields permit passage of electrons within a narrow energy range. The scintillator is coated with a layer of tantalum and a layer of gold to provide thermal stability and resistance to damage from bombardment by high-energy electrons.

REFERENCES:
patent: 3582649 (1971-06-01), Taylor
patent: 3760180 (1973-09-01), Weber

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