Electron beam vaporizer

Details Electron beam vaporizer Electron beam vaporizer

1976-10-04

1978-09-19

Envall, Jr., R. N.

Coating apparatus

With means to apply electrical and/or radiant energy to work...

With electromagnetic and/or electrostatic removal of...

118 491, H01J 37305

Patent

active

041156536

ABSTRACT:
Electron beam vaporizer having a beam generator with a heated cathode, focusing means and electromagnetic deflection means for the deflection and guidance of the beam. An exchangeable, fluid-cooled and preferably rotatable vaporizing crucible associated with the beam generator and having at least one depression in the base thereof for at least one substance to be vaporized. The crucible has passages for the flow of a coolant beneath the depression and the base of the vaporizing crucible is constructed as separate components having a common contact surface so that a removable crucible head is formed. The crucible base is closed off from its environment with regard to the flow passages.

REFERENCES:
patent: 2745773 (1956-05-01), Weimer
patent: 3250842 (1966-05-01), Hikido
IBM Technical Disclosure Bulletin, "Removable Pocket Hearth Segment for an Electron Gun", Arfman et al, vol. 17, No. 12, May 1975.

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