Electron beam vaporizer

Details Electron beam vaporizer Electron beam vaporizer

1984-10-26

1986-09-09

Envall, Jr., Roy N.

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

219121ES, H01J 37305

Patent

active

046113304

ABSTRACT:
An electron beam vaporizer with an electron beam generator (1), a first magnetic deflector system (7) with parallel elongate pole plates (8) for linear beam deflection along a first coordinate, and with a second magnetic deflector system (10) for beam deflection along a second coordinate, perpendicular to the first coordinate. An elongate vaporizing crucible (6) holds the material to be vaporized. To solve the problem of maintaining focus even over large deflection angles and to be able to correct the deflection pattern, the invention proposes the following:

REFERENCES:
patent: 3497602 (1970-02-01), DuBois
patent: 3535428 (1970-10-01), Hanks
patent: 3896258 (1975-07-01), Hanks
patent: 4105890 (1978-08-01), Movchan et al.

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