Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1979-11-30
1981-05-12
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250398, H01J 3700
Patent
active
042674565
ABSTRACT:
An electron beam type exposure apparatus includes an electron generator for emitting electron beams modulated in accordance with dot data read out of a memory, a drive unit for vertically moving a table carrying a workpiece on which a pattern is to be drawn, and a scanning unit for scanning the surface of the workpiece by electron beams. The exposure apparatus further includes an image selection circuit for judging from dot pattern data read out of the memory whether a pattern to be drawn on the workpiece represents a regular or mirror image, and the dot data are read out of the memory in the order defined by the direction in which the workpiece-carrying table is moved and also by an output logic signal from the image selection circuit.
REFERENCES:
patent: 3900737 (1975-08-01), Collier et al.
patent: 4051381 (1977-09-01), Trotel
patent: 4119857 (1978-10-01), Desperques-Volmier
patent: 4151421 (1979-04-01), Sumi
patent: 4181860 (1980-01-01), Sumi
Hidai Yutaka
Okuda Nobuo
Anderson Bruce C.
Tokyo Shibaura Denki Kabushiki Kaisha
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