Electron beam treatment device

Details Electron beam treatment device Electron beam treatment device

2005-04-19

2005-04-19

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

Reexamination Certificate

active

06881969

ABSTRACT:
An electron beam treatment device is provided for treating a substance located in a processing chamber which includes electron beam tubes arranged such that electron beam windows project into the processing chamber. The electron beam tubes are arranged such that an absorption dose of the entire treatment area of the substance to be treated has a given distribution. The electron beams emitted by the electron beam tubes are advantageously superimposed so that the absorption dose of the entire treatment area of the substance to be treated in shifted into a given distribution condition, and in which thus the entire treatment area of the substance to be treated can be treated as a whole without moving the substance to be treated.

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patent: RE35203 (1996-04-01), Wakalopulos
patent: 5909032 (1999-06-01), Wakalapulos
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patent: 6140657 (2000-10-01), Wakalapulos et al.
patent: 6246824 (2001-06-01), Vandeberg et al.
patent: 1 104 002 (2001-05-01), None

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