Electron beam testing of integrated circuits

Details Electron beam testing of integrated circuits Electron beam testing of integrated circuits

1975-06-30

1976-07-13

Rolinec, R. V.

Electricity: measuring and testing

Plural, automatically sequential tests

29574, 324 73AT, 250398, G01R 1512

Patent

active

039696707

ABSTRACT:
Disclosed is a technique for testing functional circuit units of an integrated circuit. For each separate functional circuit unit desired to be tested, a capacitor is connected to each input while a diode is connected to each output. An electron beam then selectively renders first the selected capacitors conductive, permitting the application of a desired input pattern, and then the selected diode is rendered conductive in the reverse direction, permitting sensing.

REFERENCES:
patent: 3351716 (1970-09-01), Tarui et al.
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 3787720 (1974-01-01), Kiewit
patent: 3796947 (1974-03-01), Harrod et al.
patent: 3810301 (1974-05-01), Cook
patent: 3861023 (1975-01-01), Bennett
patent: 3879613 (1975-04-01), Scott et al.

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