Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-02-19
1989-05-09
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324 73R, 324 713, 250310, 250311, G01R 3122, G01R 3126
Patent
active
048292435
ABSTRACT:
An electron beam testing apparatus for applying an electron beam to parts of an electronic component and measuring the secondary electrons released from the part including a secondary electron collector having a plurality of vertically extending screens with a detector positioned adjacent one of the screens. A different voltage is applied to each of the screens of the collector for collecting the secondary electrons over a large area. The apparatus may include a combination blanking and Faraday cup for metering the electron beam current when it is blanked. The apparatus may also be used to measure net work capacitance by measuring the time required to charge a network to a predetermined voltage.
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Ross Andrew W.
Woodard, Sr. Ollie C.
Eisenzopf Reinhard J.
Microelectronics and Computer Technology Corporation
Nguyen Vinh P.
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