Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1987-02-10
1988-08-23
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324 73R, 250396ML, 250310, 250311, G01N 2300, H01J 3726
Patent
active
047663723
ABSTRACT:
An electron beam tester for fault detection and isolation in large and very large scale integrated circuits. An electron optical column focuses a primary beam of electrons on the surface of a circuit chip. An immersion extractor provides an electrical field to attract secondary electrons emitted from the irradiated surface. Secondary electrons are detected in an integral spectrometer. A wide bore final lens and integral high resolution double defection scan coils enable large area voltage contrast imaging as well as quantitative waveform measurement from internal nodes of the circuit chip.
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Eisenzopf Reinhard J.
Intel Corporation
Nguyen Vinh P.
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