Electron beam tester

Details Electron beam tester Electron beam tester

1997-01-10

1998-10-20

Boudreau, Leo

Image analysis

Applications

Manufacturing or product inspection

382296, 348 95, G21K 100

Patent

active

058259120

ABSTRACT:
An Electron Beam Tester which corrects deformation of a secondary electron image produced from scanning a sample with an electron beam. The secondary electron image is stored in a storage unit. Luminance data of the stored image is accumulated to obtain a projected luminance distribution. The projected luminance distribution data is then analyzed by a parallelism evaluation unit to obtain a rotation angle. Then the rotation angle is used to determine maximum parallelism and correct deformation of the secondary electron image by providing deflection control which transforms the deflectors .

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