Electron beam test system and electron beam test method

Details Electron beam test system and electron beam test method Electron beam test system and electron beam test method

2005-01-04

2005-01-04

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C324S754120, C250S310000

Reexamination Certificate

active

06839646

ABSTRACT:
An electron beam test system which can determine whether a potential is high or low for a DC signal or a signal having no potential change before the time of observation. The electron beam test system obtains potential contrast data for analysis by irradiating electron beam to a semiconductor integrated circuit device which is an analysis object. This system has a tester which supplies a test pattern signal for analysis to the semiconductor integrated circuit device and holds the supplied test pattern signal at a given time; an electron gun which irradiates electron beam to the semiconductor integrated circuit device in response to the hold; and a detector which detects the potential contrast data of the semiconductor integrated circuit device which is irradiated with electron beam.

REFERENCES:
patent: 5995647 (1999-11-01), Hamada
patent: 6459282 (2002-10-01), Nakamura
patent: 6479983 (2002-11-01), Ebiya
patent: 61-035367 (1986-02-01), None
patent: 3-254053 (1991-11-01), None
patent: 7-092238 (1995-04-01), None
patent: 8-184651 (1996-07-01), None
patent: 9-026464 (1997-01-01), None
patent: 9-033616 (1997-02-01), None
patent: 11-242071 (1999-09-01), None
U.S. patent application Ser. No. 10/226,140, Ishii, filed Aug. 23, 2002.
Ishii et al., “Study of Electron-Beam Probe for LSI Process Failure Analysis”, Technical Report of IEICE R2001-31, SSS2001-26(2001-12), pp. 13-20, Nov. 8, 2001. (w/abstract).

Affiliated with

Also associated with

Rating

Electron beam test system and electron beam test method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam test system and electron beam test method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam test system and electron beam test method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3422044