Electron beam test probe system for analyzing integrated circuit

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324158D, 250310, 250311, G01R 3128, H01J 3726

Patent

active

047060190

ABSTRACT:
An electron beam test probe system for analyzing the operation of an integrated circuit is described. It includes a circuit for generating a test signal pattern and coupling the test signal pattern to the integrated circuit under test. It also includes an electron beam test probe for making potential measurements at specified points on the surface of the integrated circuit. These potential measurements can be displayed as an image of the surface of the integrated circuit or as a graph of the potential at a specified point on the surface of the integrated circuit as a function of time for times chosen with respect to the test signal pattern. The points at which potential measurements are made may be specified with reference to a schematic diagram of the integrated circuit. The schematic diagram may be inputted to the test probe system in a format which is consistent with that used by currently available circuit simulation programs. The points at which potential measurements are made may also be specified with reference to a specific location on the integrated circuit surface. The test probe system includes storage for a layout drawing of the surface of the integrated circuit in a format which is consisted with that used in currently available mask design programs.

REFERENCES:
patent: 3628012 (1971-12-01), Plows
patent: 4169244 (1979-09-01), Plows
patent: 4646344 (1972-02-01), Plows
Fazekas et al., "Scanning Electron Beam Probes VLSI Chips"; Jul. 14, 1981; Electronics, vol. 54, No. 14; pp. 105-112.
Oatley, C. W., et al., Advanc. in Electronics & Electron Physics, vol. 21 (1965), pp. 182-247. Academic Press, Inc. New York, Scanning Electron Microscopy.
Kruit, P. et al., "Magnetic Field Paralleliser for 2-.pi.electronspectrometer and Electron-image Magnifier", J. Phys. E. Sci. Instrum., vol. 16, 1983.

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