Electron beam strip-coating apparatus

Details Electron beam strip-coating apparatus Electron beam strip-coating apparatus

1983-04-18

1985-06-25

Smith, John D.

Coating apparatus

Gas or vapor deposition

Running length work

118726, 219121EE, 219121EV, C23C 1310

Patent

active

045247170

ABSTRACT:
The present invention is a coating apparatus for temperature-sensitive broad strips or similar substrates. To obtain a high quality of coating, it is necessary to minimize the path of the electron beam (EB) through the vapor cloud, and to keep away backscattered electrons from the evaporating material. According to the invention, this problem is solved by assembling a sector field with a vertical field direction at the deflection system connected with the EB gun, which is followed by a deflection field with a horizontal field direction. The divergent electron beam is guided in lines to the evaporating material by the geometry of the fields.

REFERENCES:
patent: 3303320 (1967-02-01), Muller
patent: 3394217 (1968-07-01), Fisk
patent: 3432335 (1969-03-01), Schiller et al.
patent: 3562141 (1971-02-01), Morley
patent: 3931490 (1976-01-01), Grothe et al.
patent: 4061871 (1977-12-01), Sommerkamp et al.

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