Electron-beam stage X-Y positioning instrumentation

Details Electron-beam stage X-Y positioning instrumentation Electron-beam stage X-Y positioning instrumentation

1981-04-27

1983-03-29

Reynolds, B. A.

Electric heating

Metal heating

By arc

219121EU, 219121LY, 324260, 414750, 318592, B23K 3110, B23K 3704

Patent

active

043784828

ABSTRACT:
Electron-beam stage X-Y positioning instrumentation is provided. The electron-beam stage has a number of metal blocks affixed to its bottom. Fixed orthogonal noncontact gage heads are used to sense the distance of the heads from the parallel faces of a proximate metal block. The position of the metal block vis-a-vis the position of the fixed referenced gage heads yields the X-Y coordinates of the stage. The stage is first coarsely positioned adjacent a preselected block.Thereafter the exact position of the stage is computed from the distances sensed by the gage heads. The electron beam electronics are automatically adjusted to the actual position of the stage thereby eliminating the relatively slow, fine positioning of the stage.

REFERENCES:
patent: 3267250 (1966-08-01), Ullery
patent: 3814895 (1974-06-01), Fredriksen
patent: 4029406 (1977-06-01), Sickles

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