Electron beam source for use with varying sizes of crucibles

Details Electron beam source for use with varying sizes of crucibles Electron beam source for use with varying sizes of crucibles

1998-03-10

2000-01-11

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118726, C23C 1600

Patent

active

06012413&

ABSTRACT:
An electron beam source provides beam focusing by placing magnets under the crucible. The location of the magnets, operating in conjunction with the remaining magnetic and electromagnetic structure, permits varying sizes of crucibles to be used without redesign of the remainder of the electron beam source.

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