Electron beam source device available for detecting life...

Radiant energy – Ionic separation or analysis – Methods

Reexamination Certificate

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C250S281000, C250S489000, C250S42300F, C250S42300F, C315S111810, C315S111910

Reexamination Certificate

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07550719

ABSTRACT:
An electron beam source device is provided in which the disconnection and deterioration of a filament of the electron beam source device can be accurately predicted and determined, so as to avoid an unnecessary resource waste and increase of cost due to a premature replacement of a still-functional filament in a conventional device. Additionally, disorganization caused by a sudden disconnection or by the subsequent recovery procedure when the deformation of the filament occurs can be avoided to, reduce the measuring time, the maintenance and management man-hour. A filament current is measured at all time through a filament current measuring circuit11, and a ratio of the filament current when the light-on time is zero to the current filament current is calculated at all time through an operational circuit12.

REFERENCES:
patent: 6492640 (2002-12-01), Terakura
patent: 6756785 (2004-06-01), Peacock et al.
patent: 11-86778 (1999-03-01), None

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