Electron beam sensor

Details Electron beam sensor Electron beam sensor

2005-07-19

2005-07-19

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S492300, C156S272200

Reexamination Certificate

active

06919570

ABSTRACT:
A sensing device for sensing an electron beam includes a vacuum chamber having an electron permeable window for allowing electrons from the electron beam to enter vacuum chamber. An electrode extends within the vacuum chamber for receiving at least a portion of the electrons entering the vacuum chamber. The intensity of the electron beam is capable of being determined from the amount of electrons received by the electrode.

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